KRT-Z-96-A 经过精心设计,适用于半导体高纯度制造工艺环境,旨在提供卓越的性能和精度。 它专为处理与石英兼容的化学品而设计,可确保最佳性能和可靠性。 该系统采用GE-124高纯度石英元件、高纯度PFA管和卤素/碳灯作为加热元件,消除了金属污染风险。 其电子控制系统根据水流变化自动调节功率,并具有视觉显示和听觉警报,为用户提供最佳的安全性。
The KRT-Z-96-A is meticulously engineered for use in semiconductor high-purity manufacturing process environments designed to deliver exceptional performance and precision. Designed to handle chemicals compatible with quartz, it ensures optimal performance and reliability. The system incorporates GE-124 high-purity quartz components, high-purity PFA tubes, and halogen/carbon lamps as heating elements, eliminating metallic contamination risks. Its electronic control system automatically adjusts power based on water flow variations, with visual displays and auditory alarms providing optimal safety for users.
超纯水加热器系列产品是本公司为满足先进半导体制程中的超纯水加热需求而设计的解决方案。它不仅适用于半导体晶圆制造和高规格的先进封装过程,而且在以下多个关键制程中发挥着重要作用:
湿法清洗:在单片及槽式清洗制程中,用于去除表面污染,确保晶圆清洁。
光刻工艺:提供恒温超纯水以清洗硅片,保证光刻胶性能。
刻蚀工艺:在化学或等离子体刻蚀中,通过温控超纯水调节刻蚀过程,以提高精度和均匀性。
化学机械研磨(CMP):通过调节研磨液的温度,影响研磨速率和均匀性。
晶体生长与晶圆切割:在晶体生长阶段进行温度调节,以及在晶圆切割中去除碎屑和热量
此外,超纯水加热器也广泛应用于其他行业,包括医疗、制药、化学实验室和分析仪器、微电子和纳米技术、电力行业,以满足这些领域对高纯度和精确温度控制的严格要求。
Wet Cleaning: Used in single wafer and batch cleaning processes to remove surface contaminants, ensuring wafer cleanliness.
Photolithography: Provides temperature-controlled ultra-pure water for wafer cleaning, crucial for maintaining photoresist performance.
Etching Process: In chemical or plasma etching, temperature-controlled ultra-pure water is used to regulate the etching process, enhancing precision and uniformity.
Chemical Mechanical Polishing (CMP): Adjusts the temperature of the polishing slurry, impacting the rate and uniformity of polishing.
Crystal Growth and Wafer Slicing: Utilized for temperature regulation during crystal growth and for removing debris and heat during wafer slicing.
ultra-pure water heater is also extensively used in other industries, including medical, pharmaceutical, chemical, laboratory and analytical instrumentation, microelectronics and nanotechnology, and the power sector, to meet the high standard requirements for purity and precise temperature control.
高品质材料与技术:结合美国GE高纯石英和高效卤素灯管元件,以提高洁净度和加热效率,同时确保性能稳定。 设计与供应链优势:紧凑设计适应多样安装条件,节省空间。所有元件均达到进口标准,确保供应链稳定和产品自主性。 客户服务与支持:迅速响应,提供定制服务。长三角及珠三角的研发生产基地确保技术支持与快速交期。
High-Quality Materials and Technology: Combines American GE high-purity quartz with efficient halogen lamp elements to enhance cleanliness and heating efficiency, while ensuring stable performance. Design and Supply Chain Advantages: Compact design fits various installation conditions, saving space. All components meet imported standards, ensuring supply chain stability and product autonomy. Customer Service and Support: Prompt response with customized services. Research and production bases in the Southern China and Eastern China ensure technical support and expedited delivery times.
石英纯水加热器规格书 |
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型号 Model |
KRT-Z-24-A | KRT-Z-48-A | KRT-Z-72-A | KRT-Z-96-A | KRT-Z-144-A |
加热功率 Power |
24KW | 48KW | 72KW | 96KW | 144KW |
电压/电流 Voltage/Current |
200V/208V/380V69A/67A/36A | 200V/208V/380V139A/133A/72A | 200V/208V/380V | 200V/208V/380V277A/266A/144A | 200V/208V/380V416A/400A/216A |
208A/200A/108A | |||||
标准流量at55° Standard Flow Rate |
6L/min | 12L/min | 18L/min | 24L/min | 36L/min |
最小加热流量 Minimum Heating Flow Rate |
2L/min | 5L/min | 10L/min | ||
加热范围 Heating Range |
卤素灯管 Halogen Lamp Tube | ||||
最大加热能力 Maximum Heating Capacity |
AT=55℃(额定电压) Rated Voltage |
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温度控制精度 Temperature Control Accuracy |
±1℃ | ||||
1:使用流量的变化范围在±10%(温度随流量的变化而变化)2:纯水的进水温度变化在±5% 1:Flow Rate varies within ±10% (Temperature varies with flow rate) 2:Inlet Temperature varies within ±5% |
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3:供电电压波动在±5%(额定电压在±10%)4:以上三种情况不能同时发生 3:Power Supply Voltage Fluctuation within 5% (Rated Voltage within 10%) 4:The above three conditions cannot occur simultaneously |
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流量显示范围 Flow Rate Display Range |
0-10L/min | 0-50L/min | |||
加热器材料 Heater Material |
卤素灯管 Halogen Lamp Tube |
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加热腔材质 Heater Chamber Material |
美国GE高纯石英 American GE High-Purity Quartz |
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液体管件材料 Fittings Material |
阀(Valve):PFA PTFE 管材连接件(Pipe Material Connectors):PFA PTFE | ||||
温度控制系统 Temperature Control System |
PID控制 PID Control |
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通讯功能 Communication Function |
以太网 Ethernet |
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安全功能 Safety Features |
1:超温保护122:防干烧保护3:漏电过流保护4:低液位保护5:漏液检测 1. Over-Temperature Protection 2. Dry Burning Protection 3. Leakage and Overcurrent Protection 4. Low Liquid Level Protection5. Liquid Leakage Protection |
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重量(KG) Weight |
100 | 140 | 170 | 230 | 380 |
外观尺寸(MM) Eterior Dimensions |
W350*D850*H1500 | W350*D850*H1500 | W350*D850*H1700 | W500*D850*H1900 | W700*D850*H1900 |